With this paper, the new lapping slurry and sharpening slurry are launched. Plus the deliquescence diploma of CLBO is fallen to lowest. A fresh Doing the job engineering is likewise adopted. After tough sprucing, the concentration of extremely-precision sprucing slurry is increased effectively. So does the extremely-precision sprucing velocity, as well as wiping speed is quicker compared to the deliquescence velocity. The CLBO crystal floor roughness can realize 1nm and retain the surface area high quality effectively. Access as a result of your establishment

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We summarized The present growth status from the high-electrical power DUV laser both at the wavelength of FHG on the one-μm laser and at 193 nm. The current enhancement in the good-state/fiber laser, as well as the nonlinear optical crystals, prompts not merely the standard electric power but also the beam high quality (coherence) on the DUV lasers to an unprecedented degree.

The standard electric power on the NIR laser even now has the possible being enhanced to tens of watts including 70 W [26] When the double-go configuration can be used for your Yb:YAG SCF amplifier phase. For this reason, In case the conversion efficiency of 31% from NIR to DUV can be still taken care of at this increased energy ailment, the common output ability from the DUV laser at 258 nm may be much more than 20 W, which would be considered a amazing energy stage with the DUV laser and cause the unanticipated DUV laser machining outcomes. Additionally, for top-ability DUV laser, the UV harm in the nonlinear crystal, including the windows for CLBO crystal along with the mirrors, is an additional significant parameter for long term and secure Procedure.

Then again, the beam high quality of the bigger electricity DUV laser would grow to be even worse resulting from much more major thermal and nonlinear results. For this reason, the frequency conversion processes must be diligently meant to mitigate the aforementioned consequences. Thus, a higher-electricity DUV laser with the FHG of 1 μm with a fantastic beam high-quality can be attained and may be valuable for acquiring the shorter wavelength DUV lasers including 193 nm by SFG.

The two the 1040 nm and 1078 nm laser come from a person dual-wavelength Yb-doped fiber laser. Every laser is amplified by stages of fiber amplifier and Yb-doped materials amplifier, respectively.

On one other facet, the facility scaling of your NIR laser is yet another element to improve the ordinary ability with the 193-nm DUV laser. A result of the insufficient the superior-electric power amplification Remedy of the NIR laser (one example is at 1553 nm), nonlinear frequency processes for instance optical parameter oscillation (OPO) might be placed on build a wavelength converter by shifting the wavelength from 1 μm to the specified wavelength in addition to acquiring relative bigger electrical power [21]. Just lately, a diamond Raman laser confirmed its ability in attaining a large ability as well as a significant conversion efficiency in the 1st Stokes on the 1-μm laser [22,23], which implies the likelihood to generally be used within the 193-nm DUV laser era as a consequence of its superior Raman attain and enormous frequency change.

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During the scientific and industrial apps, the beam good quality in the DUV laser can also be an important parameter. Significantly, the beam good quality of the DUV laser considerably impacts the laser machining success. The beam high quality with the DUV laser is decided by that of the fundamental laser as well as crystal for the frequency conversion. A short while ago, a significant-ability DUV laser (>10 W) at 258 nm was described using a beam excellent of M2 < one.5, which was produced by FHG of the Yb:YAG laser at 1030 nm using the CLBO crystal [13]. This laser would cause a greater laser machining consequence as compared to the earlier DUV lasers with larger sized M2.

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The conversion performance from fundamental NIR to DUV is from 5% to 36% in accordance with the documented leads to Desk 1. Escalating the conversion efficiency will decrease the stress on the look and set up of the fundamental laser amplifier plus the electric ability consumption. A very good beam excellent of the basic laser may also contribute towards the growing of the conversion effectiveness and the appropriate energy intensity on the NIR and eco-friendly laser while in the SHG and FHG method, respectively. The CLBO Crystal very best conversion efficiencies from NIR to green and environmentally friendly to DUV laser by usage of CLBO crystal are 70% and about fifty%, respectively [twelve], which corresponds on the conversion efficiency of 35% from fundamental to DUV.

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